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Helmholtz Nano Facility (HNF)
WIKI
See Overview WIKI
Access
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Registration Access
Cleanroom Instructions
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Tools & Booking
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List of devices
Allowed resists
Allowed developer
Allowed solvents / adhesion promoter
Banned materials
Technology
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Development
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Low T Etching of Silicon
Research
News
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Messages
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HNF sets RCD-8 into operation
▾
Interposer for Quantum Computing
Brief News
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News
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Messages
Messages
HNF sets RCD-8 into operation
Interposer for Quantum Computing
New LPCVD (Low Pressure Chemical Vapor Deposition) Tool
HNF installs new laser direct writer
Last Modified: 18.11.2022